Study of Effect of Coil Movement on Growth Conditions of SiC Crystal

SiC substrates have outstanding advantages over traditional materials in power device application, and are mainly prepared by a physical vapor transport method (PVT). Whether the PVT furnace works by resistance heating or induction heating, both face the problem of the deterioration of growth condit...

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Detalles Bibliográficos
Autores principales: Zhang, Shengtao, Fu, Hao, Li, Tie, Fan, Guofeng, Zhao, Lili
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9822222/
https://www.ncbi.nlm.nih.gov/pubmed/36614620
http://dx.doi.org/10.3390/ma16010281

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9822222/
https://www.ncbi.nlm.nih.gov/pubmed/36614620
http://dx.doi.org/10.3390/ma16010281

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