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Study of Effect of Coil Movement on Growth Conditions of SiC Crystal
SiC substrates have outstanding advantages over traditional materials in power device application, and are mainly prepared by a physical vapor transport method (PVT). Whether the PVT furnace works by resistance heating or induction heating, both face the problem of the deterioration of growth condit...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9822222/ https://www.ncbi.nlm.nih.gov/pubmed/36614620 http://dx.doi.org/10.3390/ma16010281 |