Assessment of Turning Polytetrafluoroethylene External Cylindrical Groove with Curvilinear Profile Tool

Polytetrafluoroethylene (PTFE) is extensively used in equipment used for manufacturing semiconductor components and wet etching equipment. However, achieving ideal dimensional accuracy when cutting PTFE is challenging. In this study, we performed cutting experiments using a curvilinear tool and anal...

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Detalles Bibliográficos
Autores principales: Ni, Jing, Lou, Bokai, Cui, Zhi, He, Lihua, Zhu, Zefei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9822418/
https://www.ncbi.nlm.nih.gov/pubmed/36614711
http://dx.doi.org/10.3390/ma16010372

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9822418/
https://www.ncbi.nlm.nih.gov/pubmed/36614711
http://dx.doi.org/10.3390/ma16010372

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