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Assessment of Turning Polytetrafluoroethylene External Cylindrical Groove with Curvilinear Profile Tool
Polytetrafluoroethylene (PTFE) is extensively used in equipment used for manufacturing semiconductor components and wet etching equipment. However, achieving ideal dimensional accuracy when cutting PTFE is challenging. In this study, we performed cutting experiments using a curvilinear tool and anal...
Autores principales: | Ni, Jing, Lou, Bokai, Cui, Zhi, He, Lihua, Zhu, Zefei |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9822418/ https://www.ncbi.nlm.nih.gov/pubmed/36614711 http://dx.doi.org/10.3390/ma16010372 |
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