A Novel Method for Growing α-Ga(2)O(3) Films Using Mist-CVD Face-to-face Heating Plates

In this paper, the method for growing α-Ga(2)O(3) films on c-plane sapphire substrates using an inexpensive fine-channel mist-CVD face-to-face heating plate was investigated. Because high temperatures can result in reactor deformation, expensive AlN ceramics resistant to deformation are used as the...

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Detalles Bibliográficos
Autores principales: Zuo, Yan, Feng, Qian, Zhang, Tao, Tian, Xusheng, Li, Wenji, Li, Jiale, Zhang, Chunfu, Zhang, Jincheng, Hao, Yue
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9823709/
https://www.ncbi.nlm.nih.gov/pubmed/36615982
http://dx.doi.org/10.3390/nano13010072

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9823709/
https://www.ncbi.nlm.nih.gov/pubmed/36615982
http://dx.doi.org/10.3390/nano13010072

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