Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints

Existing displacement sensors of micrometers to sub-micron precision are expensive and have various limitations. This paper reports the design and development of a new contact type compact micro-displacement sensor of sub-micron precision for a fraction of the cost of commercial devices. The basic c...

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Detalles Bibliográficos
Autores principales: Tsao, Che-Chih, Tseng, Yi-Chun, Chen, Yu-Sheng, Chang, Wei-Hsuan, Huo, Li-Ting
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9823999/
https://www.ncbi.nlm.nih.gov/pubmed/36616924
http://dx.doi.org/10.3390/s23010326

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9823999/
https://www.ncbi.nlm.nih.gov/pubmed/36616924
http://dx.doi.org/10.3390/s23010326

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