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Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints

Existing displacement sensors of micrometers to sub-micron precision are expensive and have various limitations. This paper reports the design and development of a new contact type compact micro-displacement sensor of sub-micron precision for a fraction of the cost of commercial devices. The basic c...

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Autores principales: Tsao, Che-Chih, Tseng, Yi-Chun, Chen, Yu-Sheng, Chang, Wei-Hsuan, Huo, Li-Ting
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9823999/
https://www.ncbi.nlm.nih.gov/pubmed/36616924
http://dx.doi.org/10.3390/s23010326
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author Tsao, Che-Chih
Tseng, Yi-Chun
Chen, Yu-Sheng
Chang, Wei-Hsuan
Huo, Li-Ting
author_facet Tsao, Che-Chih
Tseng, Yi-Chun
Chen, Yu-Sheng
Chang, Wei-Hsuan
Huo, Li-Ting
author_sort Tsao, Che-Chih
collection PubMed
description Existing displacement sensors of micrometers to sub-micron precision are expensive and have various limitations. This paper reports the design and development of a new contact type compact micro-displacement sensor of sub-micron precision for a fraction of the cost of commercial devices. The basic concept of the new sensor system applies a mechanical magnifying mechanism to magnify a displacement at sub-micron to micron level and uses a low-cost Hall sensor to measure the magnified displacement. Various conceptual designs for the mechanical magnifying mechanism based on cascaded levers with flexural joints were studied and a final design, featuring side-by-side placement of lever structures in a multi-planar layout with adjacent levers coupled by L-shaped coupling foils, was devised. Prototypes of two different sizes and constructions with mechanical magnification ratios over 100 were made and tested. Measurement repeatability and accuracy to sub-micrometer level and a resolution down to hundredths of a micrometer were demonstrated by a compact Alpha Model prototype. Design modification of parts and a corresponding small lot size production procedure were devised to provide an estimated bill of material cost per unit under US$100.
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spelling pubmed-98239992023-01-08 Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints Tsao, Che-Chih Tseng, Yi-Chun Chen, Yu-Sheng Chang, Wei-Hsuan Huo, Li-Ting Sensors (Basel) Article Existing displacement sensors of micrometers to sub-micron precision are expensive and have various limitations. This paper reports the design and development of a new contact type compact micro-displacement sensor of sub-micron precision for a fraction of the cost of commercial devices. The basic concept of the new sensor system applies a mechanical magnifying mechanism to magnify a displacement at sub-micron to micron level and uses a low-cost Hall sensor to measure the magnified displacement. Various conceptual designs for the mechanical magnifying mechanism based on cascaded levers with flexural joints were studied and a final design, featuring side-by-side placement of lever structures in a multi-planar layout with adjacent levers coupled by L-shaped coupling foils, was devised. Prototypes of two different sizes and constructions with mechanical magnification ratios over 100 were made and tested. Measurement repeatability and accuracy to sub-micrometer level and a resolution down to hundredths of a micrometer were demonstrated by a compact Alpha Model prototype. Design modification of parts and a corresponding small lot size production procedure were devised to provide an estimated bill of material cost per unit under US$100. MDPI 2022-12-28 /pmc/articles/PMC9823999/ /pubmed/36616924 http://dx.doi.org/10.3390/s23010326 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Tsao, Che-Chih
Tseng, Yi-Chun
Chen, Yu-Sheng
Chang, Wei-Hsuan
Huo, Li-Ting
Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints
title Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints
title_full Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints
title_fullStr Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints
title_full_unstemmed Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints
title_short Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints
title_sort precision low-cost compact micro-displacement sensors based on a new arrangement of cascaded levers with flexural joints
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9823999/
https://www.ncbi.nlm.nih.gov/pubmed/36616924
http://dx.doi.org/10.3390/s23010326
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