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Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints
Existing displacement sensors of micrometers to sub-micron precision are expensive and have various limitations. This paper reports the design and development of a new contact type compact micro-displacement sensor of sub-micron precision for a fraction of the cost of commercial devices. The basic c...
Autores principales: | Tsao, Che-Chih, Tseng, Yi-Chun, Chen, Yu-Sheng, Chang, Wei-Hsuan, Huo, Li-Ting |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9823999/ https://www.ncbi.nlm.nih.gov/pubmed/36616924 http://dx.doi.org/10.3390/s23010326 |
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