Long-Term Operational Stability of Ta/Pt Thin-Film Microheaters: Impact of the Ta Adhesion Layer

Microheaters with long-term stability are crucial for the development of a variety of microelectronic devices operated at high temperatures. Structured Ta/Pt bilayers, in which the Ta sublayer ensures high adhesion of the Pt resistive layer, are widely used to create microheaters. Herein, a comprehe...

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Detalles Bibliográficos
Autores principales: Kalinin, Ivan A., Roslyakov, Ilya V., Khmelenin, Dmitry N., Napolskii, Kirill S.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9824110/
https://www.ncbi.nlm.nih.gov/pubmed/36616004
http://dx.doi.org/10.3390/nano13010094

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9824110/
https://www.ncbi.nlm.nih.gov/pubmed/36616004
http://dx.doi.org/10.3390/nano13010094

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