Combination of Material Processing and Characterization Methods for Miniaturization of Field-Effect Gas Sensor

The technological approach for the low-scale production of field-effect gas sensors as electronic components for use in non-lab ambient environments is described. In this work, in addition to the mechanical protection of a gas-sensitive structure, an emphasis was also placed on the very topical issu...

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Detalles Bibliográficos
Autores principales: Samotaev, Nikolay, Litvinov, Artur, Oblov, Konstantin, Etrekova, Maya, Podlepetsky, Boris, Dzhumaev, Pavel
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9824174/
https://www.ncbi.nlm.nih.gov/pubmed/36617112
http://dx.doi.org/10.3390/s23010514

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9824174/
https://www.ncbi.nlm.nih.gov/pubmed/36617112
http://dx.doi.org/10.3390/s23010514

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