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Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

The performance of microelectromechanical system (MEMS) inertial measurement units (IMUs) is susceptible to many environmental factors. Among different factors, temperature is one of the most challenging issues. This report reveals the bias stability analysis of an ovenized MEMS gyroscope. A micro-h...

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Detalles Bibliográficos
Autores principales: Din, Hussamud, Iqbal, Faisal, Park, Jiwon, Lee, Byeungleul
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9824465/
https://www.ncbi.nlm.nih.gov/pubmed/36616854
http://dx.doi.org/10.3390/s23010256