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Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams
With the increasing demand for multidirectional vibration measurements, traditional triaxial accelerometers cannot achieve vibration measurements with high sensitivity, high natural frequency, and low cross-sensitivity simultaneously. Moreover, for piezoresistive accelerometers, achieving pure axial...
Autores principales: | , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9832002/ https://www.ncbi.nlm.nih.gov/pubmed/36644333 http://dx.doi.org/10.1038/s41378-022-00474-z |