Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams

With the increasing demand for multidirectional vibration measurements, traditional triaxial accelerometers cannot achieve vibration measurements with high sensitivity, high natural frequency, and low cross-sensitivity simultaneously. Moreover, for piezoresistive accelerometers, achieving pure axial...

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Detalles Bibliográficos
Autores principales: Yu, Mingzhi, Zhao, Libo, Chen, Shanshan, Han, Xiangguang, Jia, Chen, Xia, Yong, Wang, Xiaozhang, Wang, Yonglu, Yang, Ping, Lu, Dejiang, Jiang, Zhuangde
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9832002/
https://www.ncbi.nlm.nih.gov/pubmed/36644333
http://dx.doi.org/10.1038/s41378-022-00474-z

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