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A practical perspective for chromatic orthogonality for implementing in photolithography

Theoretically, it is more challenging to anticipate the conversion and selectivity of a photochemical experiment compared to thermally generated reactivity. This is due to the interaction of light with a photoreactive substrate. Photochemical reactions do not yet receive the same level of broad anal...

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Detalles Bibliográficos
Autores principales: Kumar, Godlaveeti Sreenivasa, Sha, Mizaj Shabil, Yempally, Swathi, Cabibihan, John-John, Sadasivuni, Kishor Kumar
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9839670/
https://www.ncbi.nlm.nih.gov/pubmed/36639436
http://dx.doi.org/10.1038/s41598-023-27869-w