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A practical perspective for chromatic orthogonality for implementing in photolithography
Theoretically, it is more challenging to anticipate the conversion and selectivity of a photochemical experiment compared to thermally generated reactivity. This is due to the interaction of light with a photoreactive substrate. Photochemical reactions do not yet receive the same level of broad anal...
Autores principales: | Kumar, Godlaveeti Sreenivasa, Sha, Mizaj Shabil, Yempally, Swathi, Cabibihan, John-John, Sadasivuni, Kishor Kumar |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9839670/ https://www.ncbi.nlm.nih.gov/pubmed/36639436 http://dx.doi.org/10.1038/s41598-023-27869-w |
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