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Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications

The objective of this article is to review the recent advancement in piezoelectric micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric materials, device fabrication and characterization, as well as applications. PMUT has been an active research topic since the late...

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Detalles Bibliográficos
Autores principales: He, Yashuo, Wan, Haotian, Jiang, Xiaoning, Peng, Chang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9856188/
https://www.ncbi.nlm.nih.gov/pubmed/36671890
http://dx.doi.org/10.3390/bios13010055