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Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications
The objective of this article is to review the recent advancement in piezoelectric micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric materials, device fabrication and characterization, as well as applications. PMUT has been an active research topic since the late...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9856188/ https://www.ncbi.nlm.nih.gov/pubmed/36671890 http://dx.doi.org/10.3390/bios13010055 |