A Flexible Pressure Sensor Based on Silicon Nanomembrane

With advances in new materials and technologies, there has been increasing research focused on flexible sensors. However, in most flexible pressure sensors made using new materials, it is challenging to achieve high detection sensitivity across a wide pressure range. Although traditional silicon-bas...

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Detalles Bibliográficos
Autores principales: Cheng, Lixia, Hao, Xiaojian, Liu, Guochang, Zhang, Wendong, Cui, Jiangong, Zhang, Guojun, Yang, Yuhua, Wang, Renxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9856423/
https://www.ncbi.nlm.nih.gov/pubmed/36671966
http://dx.doi.org/10.3390/bios13010131

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9856423/
https://www.ncbi.nlm.nih.gov/pubmed/36671966
http://dx.doi.org/10.3390/bios13010131

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