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A Flexible Pressure Sensor Based on Silicon Nanomembrane
With advances in new materials and technologies, there has been increasing research focused on flexible sensors. However, in most flexible pressure sensors made using new materials, it is challenging to achieve high detection sensitivity across a wide pressure range. Although traditional silicon-bas...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9856423/ https://www.ncbi.nlm.nih.gov/pubmed/36671966 http://dx.doi.org/10.3390/bios13010131 |