Improvement of YX42° Cut LiTaO(3) SAW Filters with Optical Proximity Effect Correction Method

Due to the influence of the optical proximity effect (OPE), it is easy for a pattern of photoresistance to be inconsistent with a design pattern, thus damaging the performance of a SAW resonator. To solve this problem, this paper proposes an optimization method for SAW filters based on optical proxi...

Descripción completa

Detalles Bibliográficos
Autores principales: Luo, Ping, Zou, Yali, Yang, Xinyu, Li, Juntao, Huang, Xuan, Zhou, Jian, Han, Xing, Liu, Yushuai, Liu, Yuhao, Wu, Tao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9860992/
https://www.ncbi.nlm.nih.gov/pubmed/36677266
http://dx.doi.org/10.3390/mi14010205

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9860992/
https://www.ncbi.nlm.nih.gov/pubmed/36677266
http://dx.doi.org/10.3390/mi14010205

Ejemplares similares