Cargando…

Improvement of YX42° Cut LiTaO(3) SAW Filters with Optical Proximity Effect Correction Method

Due to the influence of the optical proximity effect (OPE), it is easy for a pattern of photoresistance to be inconsistent with a design pattern, thus damaging the performance of a SAW resonator. To solve this problem, this paper proposes an optimization method for SAW filters based on optical proxi...

Descripción completa

Detalles Bibliográficos
Autores principales:	Luo, Ping, Zou, Yali, Yang, Xinyu, Li, Juntao, Huang, Xuan, Zhou, Jian, Han, Xing, Liu, Yushuai, Liu, Yuhao, Wu, Tao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9860992/ https://www.ncbi.nlm.nih.gov/pubmed/36677266 http://dx.doi.org/10.3390/mi14010205

Ejemplares similares

Sinterability and Dielectric Properties of LiTaO(3)-Based Ceramics with Addition of CoO
por: Zhang, Youfeng, et al.
Publicado: (2020)

Diffusion control of an ion by another in LiNbO(3) and LiTaO(3) crystals
por: Zhang, De-Long, et al.
Publicado: (2015)

Unusual Response of Thin LiTaO(3) Films to Intense Microwave Pulses
por: Chen, Haojia, et al.
Publicado: (2019)

Structure Formation and Regulation of Au Nanoparticles in LiTaO(3) by Ion Beam and Thermal Annealing Techniques
por: Liu, Yong, et al.
Publicado: (2022)

Revealing the Plastic Mode of Time-Dependent Deformation of a LiTaO(3) Single Crystal by Nanoindentation
por: Zhou, Shengyun, et al.
Publicado: (2020)

Influence of Structural Parameters on Performance of SAW Resonators Based on 128° YX LiNbO(3) Single Crystal
por: Geng, Wenping, et al.
Publicado: (2022)

Optical Properties of Mg, Fe, Co-Doped Near-Stoichiometric LiTaO(3) Single Crystals
por: Hsu, Wei Tse, et al.
Publicado: (2012)

Dual-Passband SAW Filter Based on a 32°YX-LN/SiO(2)/SiC Multilayered Substrate
por: Xu, Huiping, et al.
Publicado: (2023)

Local Electric‐Field‐Driven Fast Li Diffusion Kinetics at the Piezoelectric LiTaO(3) Modified Li‐Rich Cathode–Electrolyte Interphase
por: Si, Mengting, et al.
Publicado: (2019)

Fractional Bandwidth up to 24% and Spurious Free SAW Filters on Bulk 15°YX-LiNbO(3) Substrates Using Thickness-Modulated IDT Structures
por: Lu, Zengtian, et al.
Publicado: (2022)

High-Performance SAW Low Temperature Sensors with Double Electrode Transducers Based on 128° YX LiNbO(3)
por: Zhu, Jiajun, et al.
Publicado: (2022)

Orientation-Independent Yield Stress and Activation Volume of Dislocation Nucleation in LiTaO(3) Single Crystal by Nanoindentation
por: Ma, Yi, et al.
Publicado: (2019)

Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO(3) Substrate
por: Wang, Wen, et al.
Publicado: (2011)

On the Room-Temperature Creep Behavior and Its Correlation with Length Scale of a LiTaO(3) Single Crystal by Spherical Nanoindentation
por: Hang, Wei, et al.
Publicado: (2019)

Room-Temperature Creep Behavior and Activation Volume of Dislocation Nucleation in a LiTaO(3) Single Crystal by Nanoindentation
por: Ma, Yi, et al.
Publicado: (2019)

The Experimental Registration of the Evanescent Acoustic Wave in YX LiNbO(3) Plate
por: Smirnov, Andrey, et al.
Publicado: (2021)

Development and Application of SAW Filter
por: Chen, Pu, et al.
Publicado: (2022)

Core–shell grain structures and ferroelectric properties of Na(0.5)K(0.5)NbO(3)–LiTaO(3)–BiScO(3) piezoelectric ceramics
por: Zhu, Fangyuan, et al.
Publicado: (2015)

A Phase Canceling Technique to Improve SAW Duplexer Isolation
por: Tao, Jianbin, et al.
Publicado: (2023)

Enhanced Catalytic Performance of Ag NP/0.95AgNbO(3)-0.05LiTaO(3) Heterojunction from the Combination of Surface Plasma Resonance Effect and Piezoelectric Effect Using Facile Mechanical Milling
por: Ren, Tianxiang, et al.
Publicado: (2023)

Minimal mechanistic component of HbYX-dependent proteasome activation
por: Chuah, Janelle J., et al.
Publicado: (2023)

Biodegradation of Poly(ethylene terephthalate) by Bacillus safensis YX8
por: Zeng, Caiting, et al.
Publicado: (2023)

The NtrYX Two-Component System Regulates the Bacterial Cell Envelope
por: Lemmer, Kimberly C., et al.
Publicado: (2020)

Cutting of Diamond Substrate Using Fixed Diamond Grain Saw Wire
por: Kamiya, Osamu, et al.
Publicado: (2022)

Design and Fabrication of Micro Saw Enabling Root-Side Cutting of Bone
por: Pathak, Pawan, et al.
Publicado: (2023)

Diffusion of $^{6}$Li in Ta and W
por: Vacik, J
Publicado: (2006)

An Actinobacterial Isolate, Streptomyces sp. YX44, Produces Broad-Spectrum Antibiotics That Strongly Inhibit Staphylococcus aureus
por: Chang, Tien-Lin, et al.
Publicado: (2021)

Identification and function analysis of yellow-leaf mutant (YX-yl) of broomcorn millet
por: Wang, Yushen, et al.
Publicado: (2022)

Experimental Study on the Influence of Wire-Saw Wear on Cutting Force and Silicon Wafer Surface
por: Liang, Lie, et al.
Publicado: (2023)

Proteome Analysis of the Wild and YX-1 Male Sterile Mutant Anthers of Wolfberry (Lycium barbarum L.)
por: Zheng, Rui, et al.
Publicado: (2012)

Radial Potential Energy Functions of Linear Halogen-Bonded Complexes YX···ClF (YX = FB, OC, SC, N(2)) and the Effects of Substituting X by Second-Row Analogues: Mulliken Inner and Outer Complexes
por: Hill, J. Grant, et al.
Publicado: (2022)

Fabrications of L-Band LiNbO(3)-Based SAW Resonators for Aerospace Applications
por: Hu, Baofa, et al.
Publicado: (2019)

Rice husk and saw dust as filter loss control agents for water-based muds
por: Agwu, Okorie E., et al.
Publicado: (2019)

Kinetic, Structural, and Mutational Analysis of Acyl-CoA Carboxylase From Thermobifida fusca YX
por: Shivaiah, Kiran-Kumar, et al.
Publicado: (2021)

Saw Palmetto
Publicado: (1898)

Saw Palmetto
Publicado: (1912)

Sawing Force Prediction Model and Experimental Study on Vibration-Assisted Diamond Wire Sawing
por: Zhang, Chenpu, et al.
Publicado: (2022)

Multiobjective Optimization of Cutting Parameters for TA10 Alloy Deep-Hole Drilling
por: Feng, Yazhou, et al.
Publicado: (2022)

Selective allylic hydroxylation of acyclic terpenoids by CYP154E1 from Thermobifida fusca YX
por: Bogazkaya, Anna M, et al.
Publicado: (2014)

Minimal mechanistic component of HbYX-dependent proteasome activation that reverses impairment by neurodegenerative-associated oligomers
por: Chuah, Janelle J. Y., et al.
Publicado: (2023)

Cannot write session to /tmp/vufind_sessions/sess_nt6857ahho6q7l4p2fhr4flbj1