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Magnetoelectric MEMS Magnetic Field Sensor Based on a Laminated Heterostructure of Bidomain Lithium Niobate and Metglas

Non-contact mapping of magnetic fields produced by the human heart muscle requires the application of arrays of miniature and highly sensitive magnetic field sensors. In this article, we describe a MEMS technology of laminated magnetoelectric heterostructures comprising a thin piezoelectric lithium...

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Detalles Bibliográficos
Autores principales: Turutin, Andrei V., Skryleva, Elena A., Kubasov, Ilya V., Milovich, Filipp O., Temirov, Alexander A., Raketov, Kirill V., Kislyuk, Aleksandr M., Zhukov, Roman N., Senatulin, Boris R., Kuts, Victor V., Malinkovich, Mikhail D., Parkhomenko, Yuriy N., Sobolev, Nikolai A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861317/
https://www.ncbi.nlm.nih.gov/pubmed/36676218
http://dx.doi.org/10.3390/ma16020484