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Magnetoelectric MEMS Magnetic Field Sensor Based on a Laminated Heterostructure of Bidomain Lithium Niobate and Metglas
Non-contact mapping of magnetic fields produced by the human heart muscle requires the application of arrays of miniature and highly sensitive magnetic field sensors. In this article, we describe a MEMS technology of laminated magnetoelectric heterostructures comprising a thin piezoelectric lithium...
Autores principales: | Turutin, Andrei V., Skryleva, Elena A., Kubasov, Ilya V., Milovich, Filipp O., Temirov, Alexander A., Raketov, Kirill V., Kislyuk, Aleksandr M., Zhukov, Roman N., Senatulin, Boris R., Kuts, Victor V., Malinkovich, Mikhail D., Parkhomenko, Yuriy N., Sobolev, Nikolai A. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861317/ https://www.ncbi.nlm.nih.gov/pubmed/36676218 http://dx.doi.org/10.3390/ma16020484 |
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