Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application

In this study, a tunable terahertz (THz) metamaterial using the micro-electro-mechanical system (MEMS) technique is proposed to demonstrate pressure sensing application. This MEMS-based tunable metamaterial (MTM) structure is composed of gold (Au) split-ring resonators (SRRs) on patterned silicon (S...

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Detalles Bibliográficos
Autores principales: Lai, Wei-Hsi, Li, Binghui, Fu, Shih-Huai, Lin, Yu-Sheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861420/
https://www.ncbi.nlm.nih.gov/pubmed/36677230
http://dx.doi.org/10.3390/mi14010169

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861420/
https://www.ncbi.nlm.nih.gov/pubmed/36677230
http://dx.doi.org/10.3390/mi14010169

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