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Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application

In this study, a tunable terahertz (THz) metamaterial using the micro-electro-mechanical system (MEMS) technique is proposed to demonstrate pressure sensing application. This MEMS-based tunable metamaterial (MTM) structure is composed of gold (Au) split-ring resonators (SRRs) on patterned silicon (S...

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Autores principales: Lai, Wei-Hsi, Li, Binghui, Fu, Shih-Huai, Lin, Yu-Sheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861420/
https://www.ncbi.nlm.nih.gov/pubmed/36677230
http://dx.doi.org/10.3390/mi14010169
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author Lai, Wei-Hsi
Li, Binghui
Fu, Shih-Huai
Lin, Yu-Sheng
author_facet Lai, Wei-Hsi
Li, Binghui
Fu, Shih-Huai
Lin, Yu-Sheng
author_sort Lai, Wei-Hsi
collection PubMed
description In this study, a tunable terahertz (THz) metamaterial using the micro-electro-mechanical system (MEMS) technique is proposed to demonstrate pressure sensing application. This MEMS-based tunable metamaterial (MTM) structure is composed of gold (Au) split-ring resonators (SRRs) on patterned silicon (Si) substrate with through Si via (TSV). SRR is designed as a cantilever on the TSV structure. When the airflow passes through the TSV from bottom to up and then bends the SRR cantilever, the SRR cantilever will bend upward. The electromagnetic responses of MTM show the tunability and polarization-dependent characteristics by bending the SRR cantilever. The resonances can both be blue-shifted from 0.721 THz to 0.796 THz with a tuning range of 0.075 THz in transverse magnetic (TM) mode and from 0.805 THz to 0.945 THz with a tuning range of 0.140 THz in transverse electric (TE) mode by changing the angle of SRR cantilever from 10° to 45°. These results provide the potential applications and possibilities of MTM design for use in pressure and flow rate sensors.
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spelling pubmed-98614202023-01-22 Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application Lai, Wei-Hsi Li, Binghui Fu, Shih-Huai Lin, Yu-Sheng Micromachines (Basel) Article In this study, a tunable terahertz (THz) metamaterial using the micro-electro-mechanical system (MEMS) technique is proposed to demonstrate pressure sensing application. This MEMS-based tunable metamaterial (MTM) structure is composed of gold (Au) split-ring resonators (SRRs) on patterned silicon (Si) substrate with through Si via (TSV). SRR is designed as a cantilever on the TSV structure. When the airflow passes through the TSV from bottom to up and then bends the SRR cantilever, the SRR cantilever will bend upward. The electromagnetic responses of MTM show the tunability and polarization-dependent characteristics by bending the SRR cantilever. The resonances can both be blue-shifted from 0.721 THz to 0.796 THz with a tuning range of 0.075 THz in transverse magnetic (TM) mode and from 0.805 THz to 0.945 THz with a tuning range of 0.140 THz in transverse electric (TE) mode by changing the angle of SRR cantilever from 10° to 45°. These results provide the potential applications and possibilities of MTM design for use in pressure and flow rate sensors. MDPI 2023-01-09 /pmc/articles/PMC9861420/ /pubmed/36677230 http://dx.doi.org/10.3390/mi14010169 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Lai, Wei-Hsi
Li, Binghui
Fu, Shih-Huai
Lin, Yu-Sheng
Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application
title Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application
title_full Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application
title_fullStr Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application
title_full_unstemmed Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application
title_short Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application
title_sort tunable mems-based terahertz metamaterial for pressure sensing application
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861420/
https://www.ncbi.nlm.nih.gov/pubmed/36677230
http://dx.doi.org/10.3390/mi14010169
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