Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers

During long-term use, MEMS accelerometers will experience degradation, such as bias and scale factor changes. Bias of MEMS capacitive accelerometers usually comes from the mismatch of parasitic capacitance and sensitive capacitance. This paper focuses on the mismatch of sensitive capacitance and ana...

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Detalles Bibliográficos
Autores principales: Huang, Xinlong, Dong, Xianshan, Du, Guizhen, Hu, Youwang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9862200/
https://www.ncbi.nlm.nih.gov/pubmed/36677251
http://dx.doi.org/10.3390/mi14010190

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9862200/
https://www.ncbi.nlm.nih.gov/pubmed/36677251
http://dx.doi.org/10.3390/mi14010190

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