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Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers
During long-term use, MEMS accelerometers will experience degradation, such as bias and scale factor changes. Bias of MEMS capacitive accelerometers usually comes from the mismatch of parasitic capacitance and sensitive capacitance. This paper focuses on the mismatch of sensitive capacitance and ana...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9862200/ https://www.ncbi.nlm.nih.gov/pubmed/36677251 http://dx.doi.org/10.3390/mi14010190 |