Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer

Due to their excellent capabilities to generate and sense ultrasound signals in an efficient and well-controlled way at the microscale, piezoelectric micromechanical ultrasonic transducers (PMUTs) are being widely used in specific systems, such as medical imaging, biometric identification, and acous...

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Detalles Bibliográficos
Autores principales: Li, Tao, Zhang, Le, Geng, Wenping, He, Jian, Rao, Yongkang, Huo, Jiabing, Yan, Kunxian, Chou, Xiujian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9862720/
https://www.ncbi.nlm.nih.gov/pubmed/36677270
http://dx.doi.org/10.3390/mi14010210

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9862720/
https://www.ncbi.nlm.nih.gov/pubmed/36677270
http://dx.doi.org/10.3390/mi14010210

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