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Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers
The measurements of wafers’ surface profile are crucial for safeguarding the fabrication quality of integrated circuits and MEMS devices. The current techniques measure the profile mainly by moving a capacitive or optical spacing sensing probe along multiple lines, which is high-cost and inefficient...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9863230/ https://www.ncbi.nlm.nih.gov/pubmed/36677183 http://dx.doi.org/10.3390/mi14010122 |
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author | Zheng, Panpan Cai, Bingyang Zhu, Tao Yu, Li Wu, Wenjie Tu, Liangcheng |
author_facet | Zheng, Panpan Cai, Bingyang Zhu, Tao Yu, Li Wu, Wenjie Tu, Liangcheng |
author_sort | Zheng, Panpan |
collection | PubMed |
description | The measurements of wafers’ surface profile are crucial for safeguarding the fabrication quality of integrated circuits and MEMS devices. The current techniques measure the profile mainly by moving a capacitive or optical spacing sensing probe along multiple lines, which is high-cost and inefficient. This paper presents the calculation, simulation and experiment of a method for measuring the surface profile with arrayed capacitive spacing transducers. The calculation agreed well with the simulation and experiment. Finally, the proposed method was utilized for measuring the profile of a silicon wafer. The result is consistent with that measured by a commercial instrument. As a movement system is not required, the proposed method is promising for industry applications with superior cost and efficiency to the existing technology. |
format | Online Article Text |
id | pubmed-9863230 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-98632302023-01-22 Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers Zheng, Panpan Cai, Bingyang Zhu, Tao Yu, Li Wu, Wenjie Tu, Liangcheng Micromachines (Basel) Article The measurements of wafers’ surface profile are crucial for safeguarding the fabrication quality of integrated circuits and MEMS devices. The current techniques measure the profile mainly by moving a capacitive or optical spacing sensing probe along multiple lines, which is high-cost and inefficient. This paper presents the calculation, simulation and experiment of a method for measuring the surface profile with arrayed capacitive spacing transducers. The calculation agreed well with the simulation and experiment. Finally, the proposed method was utilized for measuring the profile of a silicon wafer. The result is consistent with that measured by a commercial instrument. As a movement system is not required, the proposed method is promising for industry applications with superior cost and efficiency to the existing technology. MDPI 2022-12-31 /pmc/articles/PMC9863230/ /pubmed/36677183 http://dx.doi.org/10.3390/mi14010122 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Zheng, Panpan Cai, Bingyang Zhu, Tao Yu, Li Wu, Wenjie Tu, Liangcheng Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers |
title | Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers |
title_full | Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers |
title_fullStr | Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers |
title_full_unstemmed | Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers |
title_short | Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers |
title_sort | multi-grid capacitive transducers for measuring the surface profile of silicon wafers |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9863230/ https://www.ncbi.nlm.nih.gov/pubmed/36677183 http://dx.doi.org/10.3390/mi14010122 |
work_keys_str_mv | AT zhengpanpan multigridcapacitivetransducersformeasuringthesurfaceprofileofsiliconwafers AT caibingyang multigridcapacitivetransducersformeasuringthesurfaceprofileofsiliconwafers AT zhutao multigridcapacitivetransducersformeasuringthesurfaceprofileofsiliconwafers AT yuli multigridcapacitivetransducersformeasuringthesurfaceprofileofsiliconwafers AT wuwenjie multigridcapacitivetransducersformeasuringthesurfaceprofileofsiliconwafers AT tuliangcheng multigridcapacitivetransducersformeasuringthesurfaceprofileofsiliconwafers |