An On-Chip Microscale Vacuum Chamber with High Sealing Performance Using Graphene as Lateral Feedthrough

On-chip microscale vacuum chambers with high sealing performance and electrical feedthroughs are highly desired for microscale vacuum electronic devices and other MEMS devices. In this paper, we report an on-chip microscale vacuum chamber which achieves a high sealing performance by using monolayer...

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Detalles Bibliográficos
Autores principales: Yu, Panpan, Zhan, Fangyuan, Rao, Weidong, Zhao, Yanqing, Fang, Zheng, Tu, Zidong, Li, Zhiwei, Guo, Dengzhu, Wei, Xianlong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9864462/
https://www.ncbi.nlm.nih.gov/pubmed/36677145
http://dx.doi.org/10.3390/mi14010084

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9864462/
https://www.ncbi.nlm.nih.gov/pubmed/36677145
http://dx.doi.org/10.3390/mi14010084

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