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Adhesion Evaluation of an Embedded SiN/GaAs Interface Using a Novel “Push-Out” Technique

Adhesion assessments of an embedded interface in a multilayer system that contains a ductile layer are challenging. The occurrence of plastic deformation in the ductile layer often leads to additional complexity in analysis. In this study, an innovative “push-out” technique was devised to evaluate t...

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Detalles Bibliográficos
Autores principales: Dehkhoda, Sahar, Lu, Mingyuan, Huang, Han
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9864989/
https://www.ncbi.nlm.nih.gov/pubmed/36677098
http://dx.doi.org/10.3390/mi14010037

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