Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing

Here, we introduce ultrafast tunable MEMS mirrors consisting of a miniature circular mirrored membrane, which can be electrostatically actuated to change the mirror curvature at unprecedented speeds. The central deflection zone is a close approximation to a parabolic mirror. The device is fabricated...

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Detalles Bibliográficos
Autores principales: Kashani Ilkhechi, Afshin, Martell, Matthew, Zemp, Roger
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9865535/
https://www.ncbi.nlm.nih.gov/pubmed/36677101
http://dx.doi.org/10.3390/mi14010040

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9865535/
https://www.ncbi.nlm.nih.gov/pubmed/36677101
http://dx.doi.org/10.3390/mi14010040

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