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Design and Optimization of Thermal Field for PVT Method 8-Inch SiC Crystal Growth
As a wide bandgap semiconductor material, silicon carbide has promising prospects for application. However, its commercial production size is currently 6 inches, and the difficulty in preparing larger single crystals increases exponentially with size increasing. Large-size single crystal growth is f...
Autores principales: | Zhang, Shengtao, Fu, Guoqing, Cai, Hongda, Yang, Junzhi, Fan, Guofeng, Chen, Yanyu, Li, Tie, Zhao, Lili |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9867089/ https://www.ncbi.nlm.nih.gov/pubmed/36676509 http://dx.doi.org/10.3390/ma16020767 |
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