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Research progress of large size SiC single crystal materials and devices

SiC semiconductor is the focus of recent international research. It is also an important raw material for China to achieve carbon emission peak and carbon neutrality. After nearly 20 years of research and development, we focus on the three types SiC crystals, n-type, p-type and semi-insulating, indi...

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Detalles Bibliográficos
Autores principales: Chen, Xiufang, Yang, Xianglong, Xie, Xuejian, Peng, Yan, Xiao, Longfei, Shao, Chen, Li, Huadong, Hu, Xiaobo, Xu, Xiangang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9873793/
https://www.ncbi.nlm.nih.gov/pubmed/36693852
http://dx.doi.org/10.1038/s41377-022-01037-7