Scalable fabrication of self-assembled GeSn vertical nanowires for nanophotonic applications

In this work, scalable fabrication of self-assembled GeSn vertical nanowires (NWs) based on rapid thermal annealing (RTA) and inductively coupled-plasma (ICP) dry etching was proposed. After thermal treatment of molecular-beam-epitaxy-grown GeSn, self-assembled Sn nanodots (NDs) were formed on surfa...

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Detalles Bibliográficos
Autores principales: Lin, Guangyang, An, Yuying, Ding, Haokun, Zhao, Haochen, Wang, Jianyuan, Chen, Songyan, Li, Cheng, Hickey, Ryan, Kolodzey, James, Zeng, Yuping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: De Gruyter 2023
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9889135/
https://www.ncbi.nlm.nih.gov/pubmed/36776470
http://dx.doi.org/10.1515/nanoph-2022-0489

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9889135/
https://www.ncbi.nlm.nih.gov/pubmed/36776470
http://dx.doi.org/10.1515/nanoph-2022-0489

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