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Scalable fabrication of self-assembled GeSn vertical nanowires for nanophotonic applications
In this work, scalable fabrication of self-assembled GeSn vertical nanowires (NWs) based on rapid thermal annealing (RTA) and inductively coupled-plasma (ICP) dry etching was proposed. After thermal treatment of molecular-beam-epitaxy-grown GeSn, self-assembled Sn nanodots (NDs) were formed on surfa...
Autores principales: | Lin, Guangyang, An, Yuying, Ding, Haokun, Zhao, Haochen, Wang, Jianyuan, Chen, Songyan, Li, Cheng, Hickey, Ryan, Kolodzey, James, Zeng, Yuping |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
De Gruyter
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9889135/ https://www.ncbi.nlm.nih.gov/pubmed/36776470 http://dx.doi.org/10.1515/nanoph-2022-0489 |
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