Micromechanical BEoL robustness evaluation methods enabling loading condition customization and acoustic emission damage monitoring()

For micromechanical robustness evaluation methods, it is advantageous if the mechanical loading conditions applied can be controlled as precisely as possible. For microchips, this is required to determine the robustness under specific conditions, e.g. during assembly or characteristic application/us...

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Detalles Bibliográficos
Autores principales: Silomon, Jendrik, Chimeg, Dulguun, Clausner, André, Zschech, Ehrenfried
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2023
Materias:
Method Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9918789/
https://www.ncbi.nlm.nih.gov/pubmed/36785800
http://dx.doi.org/10.1016/j.mex.2023.102028

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9918789/
https://www.ncbi.nlm.nih.gov/pubmed/36785800
http://dx.doi.org/10.1016/j.mex.2023.102028

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