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Micromechanical BEoL robustness evaluation methods enabling loading condition customization and acoustic emission damage monitoring()
For micromechanical robustness evaluation methods, it is advantageous if the mechanical loading conditions applied can be controlled as precisely as possible. For microchips, this is required to determine the robustness under specific conditions, e.g. during assembly or characteristic application/us...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9918789/ https://www.ncbi.nlm.nih.gov/pubmed/36785800 http://dx.doi.org/10.1016/j.mex.2023.102028 |