Modeling of Masked Droplet Deposition for Site-Controlled Ga Droplets

Site-controlled Ga droplets on AlGaAs substrates are fabricated using area-selective deposition of Ga through apertures in a mask during molecular beam epitaxy (MBE). The Ga droplets can be crystallized into GaAs quantum dots using a crystallization step under As flux. In order to model the complex...

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Detalles Bibliográficos
Autores principales: Feddersen, Stefan, Zolatanosha, Viktoryia, Alshaikh, Ahmed, Reuter, Dirk, Heyn, Christian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9920042/
https://www.ncbi.nlm.nih.gov/pubmed/36770427
http://dx.doi.org/10.3390/nano13030466

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9920042/
https://www.ncbi.nlm.nih.gov/pubmed/36770427
http://dx.doi.org/10.3390/nano13030466

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