Towards a MEMS Force Sensor via the Electromagnetic Principle

Force measurement is a science discipline that experiences significant progress with the introduction of new materials and evaluation methods. Many different sensor types, working on different principles, have been developed and reviewed and have found use in medicine as well as many other industrie...

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Detalles Bibliográficos
Autores principales: Hartansky, Rene, Mierka, Martin, Jancarik, Vladimir, Bittera, Mikulas, Halgos, Jan, Dzuris, Michal, Krchnak, Jakub, Hricko, Jaroslav, Andok, Robert
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9920737/
https://www.ncbi.nlm.nih.gov/pubmed/36772281
http://dx.doi.org/10.3390/s23031241

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9920737/
https://www.ncbi.nlm.nih.gov/pubmed/36772281
http://dx.doi.org/10.3390/s23031241

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