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Towards a MEMS Force Sensor via the Electromagnetic Principle
Force measurement is a science discipline that experiences significant progress with the introduction of new materials and evaluation methods. Many different sensor types, working on different principles, have been developed and reviewed and have found use in medicine as well as many other industrie...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9920737/ https://www.ncbi.nlm.nih.gov/pubmed/36772281 http://dx.doi.org/10.3390/s23031241 |