Cargando…
A High-Linearity Closed-Loop Capacitive Micro-Accelerometer Based on Ring-Diode Capacitance Detection
This paper presents an implementation scheme and experimental evaluation of a high-linearity closed-loop capacitive accelerometer based on ring-diode capacitance detection. By deducing the capacitance detection model of the ring-diode considering the influence of the diode, the existing theoretical...
| Autores principales: | , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9921293/ https://www.ncbi.nlm.nih.gov/pubmed/36772607 http://dx.doi.org/10.3390/s23031568 |