On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation

This research investigates the feasibility of mass sensing in piezoresistive MEMS devices based on catastrophic bifurcation and sensitivity enhancement due to the orientation adjustment of the device with respect to the crystallographic orientation of the silicon wafer. The model studied is a cantil...

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Detalles Bibliográficos
Autores principales: Azizi, Saber, Madinei, Hadi, Khodaparast, Hamed Haddad, Faroughi, Shirko, Friswell, Michael I.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Netherlands 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9925932/
https://www.ncbi.nlm.nih.gov/pubmed/36818752
http://dx.doi.org/10.1007/s10999-023-09650-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9925932/
https://www.ncbi.nlm.nih.gov/pubmed/36818752
http://dx.doi.org/10.1007/s10999-023-09650-z

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