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On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation
This research investigates the feasibility of mass sensing in piezoresistive MEMS devices based on catastrophic bifurcation and sensitivity enhancement due to the orientation adjustment of the device with respect to the crystallographic orientation of the silicon wafer. The model studied is a cantil...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer Netherlands
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9925932/ https://www.ncbi.nlm.nih.gov/pubmed/36818752 http://dx.doi.org/10.1007/s10999-023-09650-z |