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Structural and mechanical properties of Si-doped CrN coatings deposited by magnetron sputtering technique

This study successfully deposited Si-doped CrN coatings onto Si (100) substrate by direct current magnetron sputtering. The concentration of Si in the CrSiN coatings was varied by changing the Si target current during deposition. The microstructural and mechanical properties were determined by emplo...

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Detalles Bibliográficos
Autores principales: Vyas, Anand, Aliyu, Ahmed
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9929308/
https://www.ncbi.nlm.nih.gov/pubmed/36816227
http://dx.doi.org/10.1016/j.heliyon.2023.e13461