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Structural and mechanical properties of Si-doped CrN coatings deposited by magnetron sputtering technique
This study successfully deposited Si-doped CrN coatings onto Si (100) substrate by direct current magnetron sputtering. The concentration of Si in the CrSiN coatings was varied by changing the Si target current during deposition. The microstructural and mechanical properties were determined by emplo...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9929308/ https://www.ncbi.nlm.nih.gov/pubmed/36816227 http://dx.doi.org/10.1016/j.heliyon.2023.e13461 |