Low-Temperature Direct Synthesis of Multilayered h-BN without Catalysts by Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition

[Image: see text] Low-temperature direct synthesis of thick multilayered hexagonal-boron nitride (h-BN) on semiconducting and insulating substrates is required to produce high-performance electronic devices based on two-dimensional (2D) materials. In this study, multilayered h-BN with a thickness ex...

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Detalles Bibliográficos
Autores principales: Yamamoto, Masaya, Murata, Hiromasa, Miyata, Noriyuki, Takashima, Hiroshi, Nagao, Masayoshi, Mimura, Hidenori, Neo, Yoichiro, Murakami, Katsuhisa
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9933473/
https://www.ncbi.nlm.nih.gov/pubmed/36816676
http://dx.doi.org/10.1021/acsomega.2c06757

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9933473/
https://www.ncbi.nlm.nih.gov/pubmed/36816676
http://dx.doi.org/10.1021/acsomega.2c06757

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