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Low-Temperature Direct Synthesis of Multilayered h-BN without Catalysts by Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition
[Image: see text] Low-temperature direct synthesis of thick multilayered hexagonal-boron nitride (h-BN) on semiconducting and insulating substrates is required to produce high-performance electronic devices based on two-dimensional (2D) materials. In this study, multilayered h-BN with a thickness ex...
Autores principales: | Yamamoto, Masaya, Murata, Hiromasa, Miyata, Noriyuki, Takashima, Hiroshi, Nagao, Masayoshi, Mimura, Hidenori, Neo, Yoichiro, Murakami, Katsuhisa |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2023
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9933473/ https://www.ncbi.nlm.nih.gov/pubmed/36816676 http://dx.doi.org/10.1021/acsomega.2c06757 |
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