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Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes
In this paper, a modification to the eigenmode operation of resonant gyroscopes is introduced. The multi-coefficient eigenmode operation can improve cross-mode isolation due to electrode misalignments and imperfections, which is one of the causes of residual quadrature errors in conventional eigenmo...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9945455/ https://www.ncbi.nlm.nih.gov/pubmed/36844940 http://dx.doi.org/10.1038/s41378-023-00486-3 |