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Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

In this paper, a modification to the eigenmode operation of resonant gyroscopes is introduced. The multi-coefficient eigenmode operation can improve cross-mode isolation due to electrode misalignments and imperfections, which is one of the causes of residual quadrature errors in conventional eigenmo...

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Detalles Bibliográficos
Autores principales: Liu, Zhenming, Wen, Haoran, Ayazi, Farrokh
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9945455/
https://www.ncbi.nlm.nih.gov/pubmed/36844940
http://dx.doi.org/10.1038/s41378-023-00486-3